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Patent Searching and Data


Title:
RESIN SEALING DEVICE FOR SEMICONDUCTOR
Document Type and Number:
Japanese Patent JP2000031178
Kind Code:
A
Abstract:

To provide a semiconductor resin sealing device, with which the molding quality of resin sealing can be improved by having uniform thrust of a plurality of injection plungers and stabilized sliding property with an equal pressure injection plunger structure using a working fluid.

This resin sealing device in provided with an injection cylinder 2, having three working chambers 10 where three pistons 9 move slidingly and each working camber 10 on the side where a working fluid is airtightly sealed, injection plungers 1 which are connected to each piston 9 and injection pressure is applied to resin, a pressure sensor 3 which detects the pressure of the working fluid in the injection cylinder 2, a pressurizing means 12 which impart working pressure to the working fluid, and an arithmetic unit 8 which controls by feed-back the pressurizing force of the pressurizing means 12 through the detected pressure of the pressure sensor 3.


Inventors:
YAMAGUCHI RIKIYA
Application Number:
JP19868798A
Publication Date:
January 28, 2000
Filing Date:
July 14, 1998
Export Citation:
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Assignee:
NEC CORP
International Classes:
B29C45/02; B29C45/53; B29C45/77; H01L21/56; B29L31/34; (IPC1-7): H01L21/56; B29C45/02; B29C45/53; B29C45/77
Attorney, Agent or Firm:
Masanori Fujimaki