Title:
ハイパーブランチ構造を有する樹脂及びそれを用いたレジスト剤
Document Type and Number:
Japanese Patent JP4366656
Kind Code:
B2
Inventors:
Hirotoshi Kizumoto
Takeshi Yatsuzuka
Ryo Hamasaki
Takeshi Yatsuzuka
Ryo Hamasaki
Application Number:
JP2004196868A
Publication Date:
November 18, 2009
Filing Date:
July 02, 2004
Export Citation:
Assignee:
TOYO BOSEKI KABUSHIKI KAISHA
International Classes:
C08G85/00; C08G63/66; G03F7/027
Domestic Patent References:
| JP4145111A | ||||
| JP2003261659A | ||||
| JP2005047979A | ||||
| JP2002541296A | ||||
| JP2005538242A | ||||
| JP2004348038A |
Foreign References:
| WO2004042366A1 |