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Title:
RESIST APPLYING APPARATUS
Document Type and Number:
Japanese Patent JP2009056422
Kind Code:
A
Abstract:

To provide a resist film applying apparatus employing a spray resist method which highly accurately deposits an electrodeposited resist film having uniform film thickness.

The apparatus is provided with a two-fluid nozzle (82) for mixing a resist agent and a carrier gas to spray the resist agent in an atomized state, a resist container (80) which is provided with the two-fluid nozzle at a prescribed height position and causes resist particles having larger weight in the resist particles sprayed from the two-fluid nozzle to fall down, a discharge port (81) which is provided above the height position of the two-fluid nozzle and discharges the resist particles having a lighter weight in the resist particles together with the carrier gas and adjusting parts (87-89) for adjusting the height of the discharge port in the height from the height position of the two-fluid nozzle to the top of the resist container.


Inventors:
ICHIKAWA RYOICHI
Application Number:
JP2007227342A
Publication Date:
March 19, 2009
Filing Date:
September 03, 2007
Export Citation:
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Assignee:
NIHON DEMPA KOGYO CO
International Classes:
B05B7/04; G03F7/16; H01L21/027
Attorney, Agent or Firm:
Nobukazu Ito



 
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