Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
Document Type and Number:
Japanese Patent JP2013011861
Kind Code:
A
Abstract:

To provide a resist composition that can give a sufficient focus margin (DOF).

There is provided a resist composition comprising: (A) a resin having a structural unit derived from a compound represented by formula (a); and (B) an acid generator. In formula (a), R1 represents a hydrogen atom or a methyl group. A1 is represented by formula (a-g1):-(A10-X10)s-A11- (In formula (a-g1), s represents an integer of 0 to 2, A10 and A11 each independently represent an aliphatic hydrocarbon group having 1 to 5 carbon atoms or the like, and X10 represents an oxygen atom, carbonyl group, carbonyloxy group, oxycarbonyl group or the like.), and R2 represents an optionally substituted aliphatic hydrocarbon group having 1 to 18 carbon atoms, or the like.


Inventors:
MASUYAMA TATSURO
ICHIKAWA KOJI
Application Number:
JP2012110324A
Publication Date:
January 17, 2013
Filing Date:
May 14, 2012
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SUMITOMO CHEMICAL CO
International Classes:
G03F7/039; C08F220/34; G03F7/004; H01L21/027
Attorney, Agent or Firm:
Fukami patent office