Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
RESIST COMPOSITION AND PATTERN FORMING METHOD USING IT
Document Type and Number:
Japanese Patent JP11174669
Kind Code:
A
Abstract:

To provide a resist composition for developing, by an alkaline water solution, a positive type pattern, high in sensitivity, high in resolution, and good in stability, and a pattern forming method using it.

In a chemically amplifying resist composition including, at least, an alkali-soluble resin, a medium for changing solubility of an alkaline solution by a reation using an acid as a catalyst, and an acid precursor for producing an acid by radiation exposure, an organic salt having an anion site expressed by a general formula 1 being an alkyl sulfonic acid or an aryl sulfonic acid, is added to the resist composition. In the formula, R1, R2, R3, and R4 are alkyl radicals having 1 to 6 carbon atoms or substituted alkyl radicals, Y- stands for an alkyl sulfonic acid or an aryl sulfonic acid.


Inventors:
Arai, Tadashi
Sakamizu, Toshio
Murai, Fumio
Suzuki, Yasunori
Application Number:
JP1997000338454
Publication Date:
July 02, 1999
Filing Date:
December 09, 1997
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
HITACHI LTD
HITACHI CHEM CO LTD
International Classes:
G03F7/004; G03F7/039; H01L21/027; G03F7/004; G03F7/039; H01L21/02; (IPC1-7): G03F7/004; G03F7/039; H01L21/027