Title:
レジスト組成物及びパターン形成方法
Document Type and Number:
Japanese Patent JP4088753
Kind Code:
B2
Inventors:
Jun Hatakeyama
Tomohiro Kobayashi
Takeshi Watanabe
Tomohiro Kobayashi
Takeshi Watanabe
Application Number:
JP2001369719A
Publication Date:
May 21, 2008
Filing Date:
December 04, 2001
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F7/004; C07C255/14; C07C255/16; C07C255/24; C07D295/14; C07D307/04; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
| JP2000212152A | ||||
| JP2017161A | ||||
| JP58118585A | ||||
| JP51143661A | ||||
| JP2004536328A | ||||
| JP7230169A | ||||
| JP4230645A | ||||
| JP5232706A |
Foreign References:
| US5869653 | ||||
| US4787933 |
Attorney, Agent or Firm:
Takashi Kojima
Yuko Nishikawa
Yuko Nishikawa