Title:
レジスト組成物及びパターン形成方法
Document Type and Number:
Japanese Patent JP5523823
Kind Code:
B2
Inventors:
Masako Sugihara
Takashi Hiraoka
Takayuki Miyagawa
Takashi Hiraoka
Takayuki Miyagawa
Application Number:
JP2009299018A
Publication Date:
June 18, 2014
Filing Date:
December 29, 2009
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
| JP2009258695A | ||||
| JP2009230026A | ||||
| JP2008165218A | ||||
| JP2008209917A | ||||
| JP2010186177A |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation