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Title:
RESIST COMPOSITION AND PRODUCTION METHOD OF RESIST PATTERN
Document Type and Number:
Japanese Patent JP2014026260
Kind Code:
A
Abstract:

To provide a resist composition from which a resist pattern with superior pattern collapse resistance can be produced.

The resist composition contains an acid generator expressed by formula (I) and a resin having an acid-labile group. In formula (I), R1 and R2 each independently represent a hydrocarbon group having 1 to 12 carbon atoms, alkoxy group having 1 to 6 carbon atoms, acyl group having 2 to 7 carbon atoms, acyloxy group having 2 to 7 carbon atoms, alkoxycarbonyl group having 2 to 7 carbon atoms, nitro group or a halogen atom; m and n each independently represent an integer of 0 to 4, and when m is 2 or more, a plurality of R1 may be the same or different from each other, and when n is 2 or more, a plurality of R2 may be the same or different from each other; A- represents an organic anion.


Inventors:
YASUE TAKAHIRO
ICHIKAWA KOJI
Application Number:
JP2013047599A
Publication Date:
February 06, 2014
Filing Date:
March 11, 2013
Export Citation:
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Assignee:
SUMITOMO CHEMICAL CO
International Classes:
G03F7/004; G03F7/038; G03F7/039; C07C25/18; C07C63/70; C07C309/06; C07C309/17; C07C381/12
Domestic Patent References:
JP2004361577A2004-12-24
JP2012189977A2012-10-04
JP2014115624A2014-06-26
JPH01144416A1989-06-06
JP2002069110A2002-03-08
JP2001106648A2001-04-17
JPH07179511A1995-07-18
Foreign References:
WO2004002955A22004-01-08
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto