Title:
レジスト組成物、およびレジストパターン形成方法
Document Type and Number:
Japanese Patent JP5276958
Kind Code:
B2
Inventors:
Yoshiyuki Utsumi
Kensuke Matsuzawa
Hiroaki Shimizu
Takeshi Nakamura
Kensuke Matsuzawa
Hiroaki Shimizu
Takeshi Nakamura
Application Number:
JP2008295385A
Publication Date:
August 28, 2013
Filing Date:
November 19, 2008
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/004; C08F20/10; G03F7/039; H01L21/027; C07C251/66; C07C309/17
Domestic Patent References:
| JP2001133980A | ||||
| JP2008209917A | ||||
| JP2007145797A | ||||
| JP2005227645A | ||||
| JP2008286924A | ||||
| JP11295895A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
Previous Patent: JPS5276957
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