Title:
レジスト組成物およびレジストパターン形成方法
Document Type and Number:
Japanese Patent JP5492396
Kind Code:
B2
Inventors:
Hideo Haneda
Yoshiyuki Utsumi
Takehiro Seshita
Yoshiyuki Utsumi
Takehiro Seshita
Application Number:
JP2008228619A
Publication Date:
May 14, 2014
Filing Date:
September 05, 2008
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/004; C07C309/12; C07D333/46; C09K3/00; G03F7/039; H01L21/027
Domestic Patent References:
| JP2008106045A | ||||
| JP2009046479A | ||||
| JP2010020204A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Noriko Yanai
Masatake Shiga
Suzuki Mitsuyoshi
Noriko Yanai