Title:
レジスト組成物、レジストパターン形成方法
Document Type and Number:
Japanese Patent JP5723648
Kind Code:
B2
Inventors:
Atsushi Iwashita
Kensuke Matsuzawa
Kensuke Matsuzawa
Application Number:
JP2011068798A
Publication Date:
May 27, 2015
Filing Date:
March 25, 2011
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/004; C08F20/38; C09K3/00; G03F7/039
Domestic Patent References:
| JP2009288441A | ||||
| JP2010122421A | ||||
| JP2005023304A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi