Title:
レジスト組成物及びレジストパターン形成方法
Document Type and Number:
Japanese Patent JP6574621
Kind Code:
B2
Inventors:
Taku Hirayama
Daisuke Kawana
Yoshimuro Komuro
Masatoshi Arai
Shogo Matsumaru
Kenta Suzuki
Kamien Takashi
Tatsuya Fujii
Daisuke Kawana
Yoshimuro Komuro
Masatoshi Arai
Shogo Matsumaru
Kenta Suzuki
Kamien Takashi
Tatsuya Fujii
Application Number:
JP2015120483A
Publication Date:
September 11, 2019
Filing Date:
June 15, 2015
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/039; C08F20/40; G03F7/004; G03F7/20
Domestic Patent References:
| JP2014235248A | ||||
| JP2005091976A | ||||
| JP2010237662A | ||||
| JP2011158891A |
Foreign References:
| WO2012002470A1 | ||||
| US20030013049 |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Matsumoto
Ryu Miyamoto
Masato Iida
Masatake Shiga
Matsumoto
Ryu Miyamoto
Masato Iida