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Title:
レジスト組成物
Document Type and Number:
Japanese Patent JP5658534
Kind Code:
B2
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Inventors:
市川 幸司
杉原 昌子
増山 達郎
Application Number:
JP2010242478A
Publication Date:
January 28, 2015
Filing Date:
October 28, 2010
Export Citation:
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Assignee:
住友化学株式会社
International Classes:
C07C311/09; C07C25/02; C07C381/12; C07D333/46; C09K3/00; G03F7/004; G03F7/039; H01L21/027
Attorney, Agent or Firm:
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