Title:
レジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4300383
Kind Code:
B2
Inventors:
Jun Hatakeyama
Tsuyoshi Kanao
Koji Hasegawa
Tsunehiro Nishi
Takeshi Watanabe
Tsuyoshi Kanao
Koji Hasegawa
Tsunehiro Nishi
Takeshi Watanabe
Application Number:
JP2000108838A
Publication Date:
July 22, 2009
Filing Date:
April 11, 2000
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F7/004; G03F7/039; C08K5/3412; C08L101/00; C08L101/02; G03F7/038; H01L21/027
Domestic Patent References:
| JP11327143A | ||||
| JP7508840A | ||||
| JP6043633A | ||||
| JP2003524799A | ||||
| JP2001142216A | ||||
| JP2000066382A |
Attorney, Agent or Firm:
Takashi Kojima
Yuko Nishikawa
Yuko Nishikawa
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