Title:
レジストパターン形成方法
Document Type and Number:
Japanese Patent JP5507601
Kind Code:
B2
Inventors:
Keita Ishizuka
Kazumasa Wakiya
Kotaro Endo
Masaaki Yoshida
Kazumasa Wakiya
Kotaro Endo
Masaaki Yoshida
Application Number:
JP2012055267A
Publication Date:
May 28, 2014
Filing Date:
March 13, 2012
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/11; C08F14/18; G03F7/38; H01L21/027
Domestic Patent References:
| JP8015859A | ||||
| JP10069091A | ||||
| JP2003167352A |
Foreign References:
| WO2005069076A1 |
Attorney, Agent or Firm:
Masayuki Masabayashi