Title:
レジスト除去方法
Document Type and Number:
Japanese Patent JP4464342
Kind Code:
B2
Inventors:
Ishihara Shigenori
Application Number:
JP2005270881A
Publication Date:
May 19, 2010
Filing Date:
September 16, 2005
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/3065
Domestic Patent References:
| JP6132259A | ||||
| JP6124923A | ||||
| JP62040729A | ||||
| JP2005236012A | ||||
| JP6310468A |
Attorney, Agent or Firm:
Yuichi Uchio