Title:
レジスト剥離剤組成物
Document Type and Number:
Japanese Patent JP4478908
Kind Code:
B2
Inventors:
Mizuki Takei
Takeshi Kotani
Takeshi Kotani
Application Number:
JP2001032243A
Publication Date:
June 09, 2010
Filing Date:
February 08, 2001
Export Citation:
Assignee:
Nagase Chemtex Co., Ltd.
International Classes:
G03F7/42; C09D9/00; H01L21/027; H01L21/308; H01L21/3213
Domestic Patent References:
| JP11016882A | ||||
| JP2000338685A | ||||
| JP11067632A | ||||
| JP7201794A |
Foreign References:
| WO2000044867A1 | ||||
| WO1998045399A1 |
Attorney, Agent or Firm:
Hiromichi Nanjo