Title:
RESIST STRIPPING AGENT USING LEVULINIC ACID AMIDES, SOLVENT, DETERGENT
Document Type and Number:
Japanese Patent JP2008015218
Kind Code:
A
Abstract:
To provide a resist stripping agent excellent in performance of stripping a resist, and to provide a solvent and a detergent having excellent dissolving power.
The resist stripping agent contains levulinic acid amides expressed by formula, CH3-CO-CH2CH2-CO-NR1R2, or the levulinic acid amides and water. In the formula, each of R1 and R2 independently represents a hydrogen atom or a 1-6C hydrocarbon group, and may be identical or different from each other, or may be coupled to form a cyclic structure.
Inventors:
MATSUO SHIGERU
Application Number:
JP2006186209A
Publication Date:
January 24, 2008
Filing Date:
July 06, 2006
Export Citation:
Assignee:
IDEMITSU KOSAN CO
International Classes:
G03F7/42; C11D7/50; C23G5/024; H01L21/027; H01L21/304
Domestic Patent References:
| JPH11158010A | 1999-06-15 | |||
| JPH08137108A | 1996-05-31 | |||
| JPH02981A | 1990-01-05 | |||
| JP2005047885A | 2005-02-24 | |||
| JPH06100828A | 1994-04-12 |
Foreign References:
| WO2007148574A1 | 2007-12-27 | |||
| US3079433A | 1963-02-26 |
Attorney, Agent or Firm:
Kihei Watanabe