Title:
RESISTIVITY GAUGE
Document Type and Number:
Japanese Patent JPS5540988
Kind Code:
A
Abstract:
Apparatus for measuring distance between a gauge head orifice, and the front planar surface of an object by sensing acoustic pressure near the gauge head orifice. The acoustic pressure is initially generated by an audio oscillator activating a speaker which emits acoustic waves through a first orifice. Acoustic pressure is sensed through a second orifice, proximate to the first, and the pressure is converted to an electrical signal which is processed to yield a distance signal for a display. Two similar distance gauges spaced apart on opposite sides of a planar member at a known distance are used to compute the thickness of the planar member.
Inventors:
KAARERU UUABANETSUKU
JIYOOJI JIEI KUREN
UIRIAMU AARU UIRAA
JIYOOJI JIEI KUREN
UIRIAMU AARU UIRAA
Application Number:
JP5466379A
Publication Date:
March 22, 1980
Filing Date:
May 01, 1979
Export Citation:
Assignee:
TENCOR INSTRUMENTS
International Classes:
G01R27/02; G01R31/26; G01S15/32; (IPC1-7): G01R27/02; G01R27/04
Domestic Patent References:
| JPS5149545A | 1976-04-28 |