Title:
抵抗炉
Document Type and Number:
Japanese Patent JP4093964
Kind Code:
B2
Abstract:
A resistance furnace has a tubular heating element with a vertically-oriented longitudinal axis. The heating element has a shell surface defined by an upper side and a lower side and surrounding a furnace chamber. The heating element is connected to at least two supply terminals by which heating current is introduced at power supply points into the heating element. The supply terminals include a surrounding upper annular collar adjacent the upper side of the shell surface, and also a surrounding lower annular collar adjacent the lower side of the shell surface.
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Inventors:
Thomas Bogdan
Olifa gantz
Olifa gantz
Application Number:
JP2003562552A
Publication Date:
June 04, 2008
Filing Date:
January 24, 2002
Export Citation:
Assignee:
Heraeus Tenebo Gesellschaft Mitt Beschlenktel Haftung
Shin-Etsu Quartz Products Co., Ltd.
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
F27B17/00; H05B3/02; F27D11/02; F27D21/00; H01L21/00; H05B3/62; F27B9/28; F27D7/02; F27D7/06; F27D9/00; F27D19/00; F27D99/00
Attorney, Agent or Firm:
Shoji Ishihara