To provide a resonator capable of improving crystallinity and piezoelectric characteristics in a piezoelectric thin film, and to provide a method of manufacturing the same.
The resonator has: a support substrate 1; a lower electrode 31 formed at one surface side of the support substrate 1; the piezoelectric thin film 32 formed at a side opposite to the side of the support substrate 1 in the lower electrode 31; and an upper electrode 33 formed at a side opposite to the side of the lower electrode 31 in the piezoelectric thin film 32. The support substrate 1 and the piezoelectric thin film 32 are formed by the same piezoelectric material KNN, and the lower electrode 31 is formed by Pt that is a material having satisfactory lattice matching properties with KNN. When manufacturing the resonator, the lower electrode 31 is formed on one surface of the support substrate 1 comprising a KNN substrate before the piezoelectric thin film 32 comprising a KNN thin film is formed, and then the upper electrode 33 is formed on the piezoelectric thin film 32 before an opening 1a is formed on the support substrate 1.
HAYAZAKI YOSHIKI
MATSUSHIMA CHOMEI
SI-BEI XIONG
YOSHIHARA TAKAAKI
YAMAUCHI NORIHIRO
Atsuo Mori