Title:
RETAINER APPARATUS FOR WAFER HOLDER
Document Type and Number:
Japanese Patent JP3191338
Kind Code:
B2
Abstract:
PURPOSE: To provide a retainer apparatus which is simple in structure without troublesome adjustments, which is capable of coping with a deformed wafer holder, and which facilitates the insertion and removal of the wafer holder.
CONSTITUTION: In a wafer holder housing which is disposed on the machine body of a semiconductor manufacturing machine, a retainer member 2 which is composed of two leaf springs 3 presses the side walls of a wafer holder from two opposite directions.
Inventors:
Hiroshi Hoshikawa
Application Number:
JP23811591A
Publication Date:
July 23, 2001
Filing Date:
September 18, 1991
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B65D85/00; B65D85/38; B65D85/57; B65D85/86; H01L21/673; H01L21/68; H01L21/683; (IPC1-7): H01L21/68; B65D85/86
Domestic Patent References:
| JP57114250A | ||||
| JP3156954A | ||||
| JP63247788A | ||||
| JP3126244A | ||||
| JP5055770A | ||||
| JP2260165A | ||||
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Attorney, Agent or Firm:
Kisaburo Suzuki (1 outside)