Title:
RETAINING DEVICE
Document Type and Number:
Japanese Patent JP2022024328
Kind Code:
A
Abstract:
To provide a retaining device capable of preventing a lift pin from coming into contact with a seal member protecting a junction layer.SOLUTION: A ceramic member 10 of an electrostatic chuck 1 has a first through hole 15, into which a lift pin 60 pushing up a semiconductor wafer W from a suction surface 11 is inserted, formed, a base member 20 has a second through hole 25, which communicates with the first through hole 15 and into which the lift pin 60 is inserted, formed, and also has at least one annular seal member 50 which is sandwiched between the ceramic member 10 and base member 20, and arranged surrounding the first through hole 15 and second through hole 25 in plan view, and the junction layer 40 is arranged outside the seal member 50, the seal member arranged most closely to the first through hole 15 and second through hole 25 among the seal members 50 is so arranged that an inner peripheral edge 51 thereof is located outside respective peripheral surfaces 15b, 25b of the first through hole 15 and second through hole 25.SELECTED DRAWING: Figure 2
Inventors:
YAMAMOTO TAKASHI
SUGIYAMA KEIGO
HIRANAKA AYAKO
SUGIYAMA KEIGO
HIRANAKA AYAKO
Application Number:
JP2020121985A
Publication Date:
February 09, 2022
Filing Date:
July 16, 2020
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
H01L21/683
Attorney, Agent or Firm:
Cosmos International Patent and Trademark Office
Previous Patent: JPWO2022024327
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