Title:
切断されたウェハをゾーン毎にクリーニングするための保持及びクリーニング装置及び方法
Document Type and Number:
Japanese Patent JP5340370
Kind Code:
B2
Abstract:
The device has superposed regions which are provided parallel to longitudinal axis (L). The upper portion of device is designed as an adapter region, through which the device is connected to a mechanical device. The lower region is designed as a holding area (2) comprising channel (11) provided with closable supply openings (5). The bottom of channel during sawing of substrate block is opened, so that sawn substrate is rinsed by passing washing liquid through passage openings. The channel is divided into several portions (11A,11B) along longitudinal axis. An independent claim is included for method for rinsing sawn substrate block.
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Inventors:
Laurent Deschan-Wagner
Application Number:
JP2011260791A
Publication Date:
November 13, 2013
Filing Date:
November 29, 2011
Export Citation:
Assignee:
RENA GmbH
International Classes:
B28D7/02; B24B27/06; H01L21/304
Domestic Patent References:
| JP9207126A | ||||
| JP10189503A | ||||
| JP2011079122A | ||||
| JP9314547A | ||||
| JP2004106360A |
Attorney, Agent or Firm:
Takuya Kuno
Takahashi
Kiyoshi Kuruma
Kimihiro Hoshi
Hiroyasu Ninomiya
Shuichi Sumiyoshi
Ryoichi Shino
Ueshima
Yasushi Miyagi
Einzel Felix-Reinhard
Takahashi
Kiyoshi Kuruma
Kimihiro Hoshi
Hiroyasu Ninomiya
Shuichi Sumiyoshi
Ryoichi Shino
Ueshima
Yasushi Miyagi
Einzel Felix-Reinhard