Title:
REVERSE MAGNETRON TYPE COLD CATHODE IONIZATION VACUUM DEVICE
Document Type and Number:
Japanese Patent JP2014211356
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a reverse magnetron type cold cathode ionization vacuum device capable of measuring at least a pressure of 10Pa or lower and in the 10Pa level.SOLUTION: A reverse magnetron type cold cathode ionization vacuum device has: a vacuum vessel 102; a cylindrical cathode 2 provided in the vacuum vessel 102; an anode 1 provided on the center axis of the cylinder of the cathode 2, and including a pair of power supply connection parts 1a, 1b for raising temperature; and magnets 6a, 6b provided detachably on the outside of the vacuum vessel 102, for generating a magnetic field in the center axis direction of the cylinder of the cathode 2.
Inventors:
WATANABE FUMIO
WATANABE REIKI
WATANABE REIKI
Application Number:
JP2013087603A
Publication Date:
November 13, 2014
Filing Date:
April 18, 2013
Export Citation:
Assignee:
SHINKU JIKKENSHITSU KK
International Classes:
G01L21/34
Domestic Patent References:
| JPH1019711A | 1998-01-23 | |||
| JP2002025398A | 2002-01-25 | |||
| JP2009128276A | 2009-06-11 | |||
| JPH03293533A | 1991-12-25 | |||
| JP2008537998A | 2008-10-02 | |||
| JPH1019711A | 1998-01-23 |
Attorney, Agent or Firm:
Keizo Okamoto
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