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Title:
Reverse magnetron type cold cathode ionization vacuum device
Document Type and Number:
Japanese Patent JP6111129
Kind Code:
B2
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Inventors:
Fumio Watanabe
Watanabe Excitation
Application Number:
JP2013087603A
Publication Date:
April 05, 2017
Filing Date:
April 18, 2013
Export Citation:
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Assignee:
Limited company vacuum laboratory
International Classes:
G01L21/34
Domestic Patent References:
JP2002025398A
JP2009128276A
JP3293533A
JP2008537998A
JP10019711A
Attorney, Agent or Firm:
Keizo Okamoto



 
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