To provide an RF-MEMS switch with a simple structure, easy to manufacture, compactly constituted, and with its information signal and an on/off operation hardly affected by noise, and, therefore, capable of surely carrying out on/off changeover.
The switch is made up by assembling a lower base plate 3 mounting a cantilever part 2, and an upper base plate at a cover side equipped with fixed-side RF input/output signal lines 4, 5. The cantilever part 2 provided at the lower base plate 3 constitutes a piezoelectric actuator, with its one end fixed to the lower base plate 3 and the other end having a contact part 6 on a top face in free up-and-down rocking movement. When the cantilever part 2 is bent upward, the contact part 6 also moves upward and comes in contact with both the RF input signal line 4 and the RF output signal line 5 on the upper base plate to electrically conduct the both lines 4, 5. Further, the lower base plate 3 does not exist under the rocking part of the cantilever part 2, with a space left there.
COPYRIGHT: (C)2011,JPO&INPIT
AOKI KAZUO
MORIYAMA MASAAKI
ESASHI MASAKI
KAWAI YUSUKE
UNIV TOHOKU
| JP2007159389A | 2007-06-21 | |||
| JP2003179085A | 2003-06-27 | |||
| JPS5837159U | 1983-03-10 | |||
| JP2008167508A | 2008-07-17 | |||
| JPS6142870U | 1986-03-19 | |||
| JP2003249136A | 2003-09-05 |
Katsumi Yamada
Hiroshige Yamada
Tomoshige Yamada