Title:
RING FRAME CONVEYANCE MECHANISM
Document Type and Number:
Japanese Patent JP2019057618
Kind Code:
A
Abstract:
To easily remove a ring frame from a ring frame holding mechanism.SOLUTION: A ring frame conveyance mechanism 10 includes: suction paths 14 for causing a suction cup 13 to communicate with a suction source 1; and an opening valve 15 disposed in the vicinity of the suction cup 13 to release a suction path 14 to the atmosphere. Since the opening valve 15 releases the suction path 14 to the atmosphere in a state where the suction cup 13 sucks and holds a ring frame F so that the ring frame F can be removed from the suction cup 13, the ring frame F can be easily removed from a ring frame holding mechanism.SELECTED DRAWING: Figure 7
Inventors:
YOSHIDA HIROTO
KUKI JUNICHI
KUKI JUNICHI
Application Number:
JP2017181139A
Publication Date:
April 11, 2019
Filing Date:
September 21, 2017
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/677; B24B41/06
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Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office