To provide a roll brush cleaning device of high throughput, capable of removing foreign matters stuck to a roll brush when it is used.

A roll brush cleaning device is equipped with a substrate support mechanism 70, a roll brush 41, a brush rotation driving mechanism 43, a brush transfer mechanism 60, and a first nozzle mechanism 42 discharging and supplying a cleaning solution toward a part of the roll brush, which comes into scrubbing contact with the surface to be cleaned of a substrate. The cleaning device also has a brush cleaning member 45, which is disposed in the vicinity of at least a rear half part of the roll brush and faces to the roll brush so that the brush fiber of a rotating roll brush can comes into contact with the cleaning member without inhibiting the rotation of the roll brush, and which scrubs off foreign matters stuck to the brush fiber of the roll brush, and a second nozzle mechanism 46, which discharges and supplies the cleaning solution to a gap formed between the brush cleaning member and the roll brush.