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Patent Searching and Data


Title:
ROLL BRUSH AND LIQUID TREATMENT DEVICE FOR SUBSTRATE
Document Type and Number:
Japanese Patent JP2009011961
Kind Code:
A
Abstract:

To provide a roll brush capable of suppressing the occurrence of irregularity of rubbing by minimizing a part having no brush around an insertion part of a bolt disposed for attachably and detachably fixing a brush base, which is attachably and detachably mounted to a rotation shaft and constitutes a plurality of split brush bodies, to the rotation shaft when performing liquid treatment for a substrate.

The plurality of split brush bodies 17 constituting a brush unit 12 are screw-inserted into a screw hole 21 of the rotation shaft 11 by inserting the bolt 20 to a bolt insertion hole 22 of the brush base 15. A washer 23 is inserted between a head part 20b of the bolt 20 and a level difference part 22c, an annular flat surface part is formed on the outer periphery side of the head part 20b of the bolt 20 on the washer 23, and supplemental brush 24 are disposed on the flat surface part.


Inventors:
Kawamura, Koichi
Ogasawara, Kazuyoshi
Application Number:
JP2007000178096
Publication Date:
January 22, 2009
Filing Date:
July 06, 2007
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORP
International Classes:
B08B1/04; A46B7/10; B08B3/02; B08B7/04; B24D13/10; G02F1/1333
Domestic Patent References:
JPH06169817A
JPH11137092A
JP2002205277A
JP2001299656A
JP2000245531A
JPS61226322A
JP2006187747A
Attorney, Agent or Firm:
影井 俊次
影井 慶大