PURPOSE: To accurately transfer the pattern of a molding stamper to a substrate by providing the molding stamper to the surface of a roller subjected to mirror surface polishing and satisfying specific relation between the radius of the roller the length of the transfer pattern of the stamper and the thickness of the stamper.
CONSTITUTION: Molding stampers 1a-1b are provided to the surface of a roller 2 subjected to mirror surface polishing and the roller has a radius (r), the length of the transfer pattern of each of the stampers is (l) and the thickness of each of the stampers is (t). In order to accurately transfer the patterns of the stampers to the substrate, it is necessary to satisfy a condition represented by a relational expression l×t≤0.1×r between the radius (r) of the roller, the length (l) of the transfer pattern of each of the stampers and the thickness (t) of each of the stampers. As a method for mounting the stampers on the surface roller subjected to mirror surface polishing, there is a method for sticking the stampers using a heat-resistant adhesive, for example, an epoxy adhesive, a polyimide adhesive or a silicone adhesive.
SUGATA HIROYUKI
JPS60177891A | 1985-09-11 | |||
JPS61109693U | 1986-07-11 |