Title:
ROLLER DEVICE FOR GUIDING FLEXIBLE SUBSTRATE, USE OF ROLLER DEVICE FOR TRANSPORTING FLEXIBLE SUBSTRATE, VACUUM PROCESSING APPARATUS, AND METHOD OF PROCESSING FLEXIBLE SUBSTRATE
Document Type and Number:
Japanese Patent JP2023078132
Kind Code:
A
Abstract:
To provide a roller device, a vacuum processing apparatus, and a method of processing a flexible substrate for coating flexible substrates with high quality layers or layer stacks having improved uniformity, improved product lifetime, and a lower number of defects per surface area.SOLUTION: A roller device (100) for guiding a flexible substrate (10) is described. The roller device (100) includes a support surface (110) for contacting the flexible substrate (10), the support surface (110) having a coating (120) comprising an electronegative polymer. Further, a vacuum processing apparatus for processing a flexible substrate including the roller device (100) and a method of processing a flexible substrate in the vacuum processing apparatus are described.SELECTED DRAWING: Figure 1
Inventors:
NEIL MORRISON
UWE HERMANNS
UWE HERMANNS
Application Number:
JP2023023480A
Publication Date:
June 06, 2023
Filing Date:
February 17, 2023
Export Citation:
Assignee:
APPLIED MATERIALS INC
International Classes:
C23C14/56; B65H20/02; B65H27/00; C23C16/54
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation