To provide long longevity by supporting a still rotating rotor to avoid breakage of a vacuum pump as a magnetic bearing loses its function at the time of power failure caused on an emergency bearing of a turbo-molecular pump by a simple means with a rolling bearing for the vacuum pump supported by magnetism, especially the emergency bearing.
At least one rolling bearing is constituted as one row or two rows of ball bearings respectively having an integral face 10 and a two-split face 11, a ball 12 is made of a ceramic material, the races 10, 11 are made of anticorrosion high alloy chrome steel (for example, X30CrMoN15(A'MS5898)), and the bearing is furnished with a rustproofing material made cover plate 13 gathering the two-split race 11 in one structural unit on both sides between an inner race and an outer race.
TREVOR MORRIS
OFFER RICHARD
