To provide a room pressure control system returning the room pressure of a second clean room from atmospheric pressure to set room pressure smoothly in a short period of time.
When resuming the room pressure control of a second clean room 12, the system 10A compares the upper/lower limit room pressure of the clean room 12 with measured room pressure while performing the operation of gradually opening the damper opening of first and second dampers 17 and 18. When the measured room pressure is within the range of the upper/lower limit room pressure, the system 10A continues the operation of gradually opening the damper opening of the dampers 17 and 18. When the measured room pressure is lower than the lower limit room pressure, the system 10A temporarily stops the opening of the damper opening of the damper 18 while opening the damper opening of the damper 17. When the measured room pressure is higher than the upper limit room pressure, the system 10A temporarily stops the opening of the damper opening of the damper 17 while opening the damper opening of the damper 18.
FURUKAWA YU
SASAKI TOSHIO
INOUE MASASHI
MIURA YUICHI
ARIMURA TETSURO
YOSHIDA TOKUJI
HIHA TAKAHISA
MORITAKU SHINJIRO
SEIGYO GIKEN KK
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| JP2012047380A | 2012-03-08 |