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Title:
ROTARY MACHINE WITH SURFACE SMOOTHENING FILM
Document Type and Number:
Japanese Patent JP2007162613
Kind Code:
A
Abstract:

To provide a rotary machine with a surface smoothening film in which the efficiency is prevented from lowering by easily removing the particulates of silica and iron oxide adhered thereto.

In this rotary machine with the surface smoothening film at the portion in which gases flow and with which the gases are brought into direct contact, the surface smoothening film of the rotary machine is composed of a ceramics layer or a carbon layer having the maximum height Ry of the surface roughness not exceeding 1.0 μm. The ceramic layer or the carbon layer is formed by physical vapor deposition or chemical vapor deposition.


Inventors:
Yasui, Toyoaki
Yamada, Yoshikazu
Hananaka, Katsuyasu
Hata, Satoshi
Tsurusaki, Yuzo
Isumi, Osamu
Application Number:
JP2005000361712
Publication Date:
June 28, 2007
Filing Date:
December 15, 2005
Export Citation:
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Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
F01D5/28; C01B31/02; C23C14/06; F01D25/00
Domestic Patent References:
JPH01147119A1989-06-08
JPS63159602A1988-07-02
JPS63114958A1988-05-19
JP2003027214A2003-01-29
JPS61204376A1986-09-10
JP2004516159A2004-06-03
JPS6338603A1988-02-19
JP2005279820A2005-10-13
JP2000205801A2000-07-28
JP2004278705A2004-10-07
JP2001226783A2001-08-21
JP2001342565A2001-12-14
Foreign References:
WO2004076710A12004-09-10
US20050227078A12005-10-13
Attorney, Agent or Firm:
田中 重光
石川 新