ROTARY SUBSTRATE PROCESSOR APPARATUS - DAINIPPON SCREEN MFG CO LTD

Title:

ROTARY SUBSTRATE PROCESSOR APPARATUS

Document Type and Number:

Japanese Patent JP10064813

Kind Code:

A

Abstract:

To reduce the size of the apparatus having chemical liq. processors and facilitate the maintenance, check and adjustment, by placing the processors along virtual circles and shifting dispensers mounted on rotatable support arms round the vertical axes at the centers of the virtual circles to the processors.

Two chemical liq. processors 2 are disposed so that their vertical axes P1 locate along virtual circles of specified radii. A chemical liq. feeder 3 for feeding chemical liqs. is disposed between the processors and has four dispensers for feeding mutually different chemical, liqs. and support arms 4 rotatable round the vertical axes P2 aligned with the centers of the vertical circles to mount and move the dispensers to feed positions above a substrate W and non-feed positions off from above the substrate, thereby selectively feeding desired chemical liq. to the substrate W.

Inventors:

Koyama, Yoshihiro
Mizohata, Yasuhiro
Tsuji, Masao
Hisai, Akihiro
Kodama, Mitsumasa
Matsunaga, Sanenobu
Yagi, Masanobu
Nakamura, Yasushi
Sato, Seiya
Kobayashi, Ippei

Application Number:

JP1997000099961

Publication Date:

March 06, 1998

Filing Date:

April 17, 1997

Export Citation:

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Assignee:

DAINIPPON SCREEN MFG CO LTD

International Classes:

G03F7/16; G03F7/30; H01L21/027; H01L21/304; H01L21/306; G03F7/16; G03F7/30; H01L21/02; (IPC1-7): H01L21/027; G03F7/16; G03F7/30; H01L21/304; H01L21/306

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