Title:
ROTARY TREATMENT DEVICE AND ARRANGING METHOD OF WORK THEREIN
Document Type and Number:
Japanese Patent JP3210186
Kind Code:
B2
Abstract:
PURPOSE: To provide a fastening means which is capable of firmly holding works restraining them from getting out of place even in rotation in a rotary treatment device, wherein no looseness is produced between the work and the fastening means.
CONSTITUTION: A wafer W is treated in a rotary treatment device through such a manner that the circumference of a work W is supported with fastening means 62 and 63, and the work W is rotated together with the fastening means 62 and 63 so as to be treated while it is rotated, wherein the work W is so supported by the fastening means 62 and 63 as to position its center G of gravity off its center O of rotation to make a centrifugal force applied to the work W by rotation larger than its own weight.
Inventors:
Yoshiyuki Honda
Application Number:
JP20455094A
Publication Date:
September 17, 2001
Filing Date:
August 04, 1994
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B08B3/04; F26B5/08; F26B11/04; H01L21/304; H01L21/68; H01L21/683; (IPC1-7): H01L21/304; B08B3/04; F26B5/08; F26B11/04; H01L21/68
Domestic Patent References:
| JP5283392A | ||||
| JP6177110A | ||||
| JP7201802A | ||||
| JP6232111A | ||||
| JP6260472A | ||||
| JP5347293A | ||||
| JP57124145U | ||||
| JP448622U |
Attorney, Agent or Firm:
Koji Hagiwara (2 outside)
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