Title:
回転保持装置
Document Type and Number:
Japanese Patent JP4395752
Kind Code:
B2
Abstract:
To provide a compact rotation holding device which is easily decomposed and has an appropriate seal.
Since a cooling water seal 110 and a vacuum seal 109 are arranged in the inner part of the radial direction of bearings 107 and 111, they can easily be inspected and exchanged. Length of the axial direction of the rotation holding device 100 is suppressed to be small. Since the rotation holding device 100 has such structure, it can be placed on the slider of an XY table and is used. The rotation holding device 100 itself can be used as the slider.
COPYRIGHT: (C)2006,JPO&NCIPI
Inventors:
Sada Goto
Nobuhito Saji
Nobuhito Saji
Application Number:
JP2004370369A
Publication Date:
January 13, 2010
Filing Date:
December 22, 2004
Export Citation:
Assignee:
Nippon Seiko Co., Ltd.
International Classes:
H01L21/683; F16C25/06; F16C33/76; H01L21/265
Domestic Patent References:
| JP5028951A | ||||
| JP7016351U | ||||
| JP3022353U | ||||
| JP2004241636A | ||||
| JP5025629A | ||||
| JP2003086530A | ||||
| JP2000087237A | ||||
| JP4336412A | ||||
| JP8329879A | ||||
| JP1255144A | ||||
| JP63192247A | ||||
| JP2004257421A |
Attorney, Agent or Firm:
Keijiro Tamura
Kenichi Kobayashi
Kenichi Kobayashi