Title:
回転塗布装置
Document Type and Number:
Japanese Patent JP3980018
Kind Code:
B2
Inventors:
Kazunobu Yamaguchi
Naomi Kawaguchi
Fukushima Takehito
Hiroshi Uno
Hiroyasu Fujii
Yamamoto Yuuki
Naomi Kawaguchi
Fukushima Takehito
Hiroshi Uno
Hiroyasu Fujii
Yamamoto Yuuki
Application Number:
JP2004197014A
Publication Date:
September 19, 2007
Filing Date:
July 02, 2004
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
Tatsumo Co., Ltd.
Tatsumo Co., Ltd.
International Classes:
B05C11/08; H01L21/02
Domestic Patent References:
| JP5169003A | ||||
| JP8281184A | ||||
| JP7031923A | ||||
| JP64053420A | ||||
| JP9122561A | ||||
| JP63278745A | ||||
| JP9190960A | ||||
| JP2088026U | ||||
| JP7332381A | ||||
| JP9271708A | ||||
| JP63164216U |
Attorney, Agent or Firm:
Yu Koyama