To prevent loosening of fitting between a rotor and a rotating shaft caused by deformation of the rotor by centrifugal forces acting on many rotor blades protruded at an outer periphery of the rotor of a turbo-molecular pump which has the rotating shaft at its center and rotates at high speed.
The rotor 1 of the molecular pump has rotor blade stages comprising a plurality of rotor blades 1b which are radially protruded in multiple stages at the outer periphery of a cylindrical hollow hub part 1a. The rotor 1 is formed in a cup shape with an axially protruding boss part 1c provided at the end of the hub part 1a. The rotor is fastened to the rotating shaft 2 with a nut 3 screwed to a screw part 2a at the leading end part of the rotating shaft 2 fitted in a shaft hole 1d provided to the boss 1c.
YOSHIDA SORO
NAKATSUJI SHIGEYOSHI
| JP2003278691A | 2003-10-02 | |||
| JPH023098U | 1990-01-10 | |||
| JPS6371492U | 1988-05-13 |
Teruaki Koyama