To provide a method for growing a ZnO nanostructure without using a metal catalyst.
A patterned zinc oxide nanostructure is grown without using a metal catalyst by forming a seed layer of a polycrystalline zinc oxide on the surface of a substrate. The seed layer can be formed by an atomic layer deposition technique. The seed layer is patterned, such as by etching, and the growth of at least one zinc-oxide nanostructure is induced substantially over the patterned seed layer by, for example, exposing the patterned seed layer to zinc vapor in the presence of a trace amount of oxygen. The seed layer can alternatively be formed by using a spin-on technique (such as a metal organic deposition technique, a spray pyrolysis technique, an RF sputtering technique) or by the oxidation of a zinc thin film layer formed on the substrate.
STECKER LISA H
| JP2004291528A | 2004-10-21 | |||
| JP2004006790A | 2004-01-08 | |||
| JP2000512078A | 2000-09-12 |
| WO2004088005A1 | 2004-10-14 |
Takaaki Yasumura
Takeshi Oshio
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