Title:
SF6 ガスの状態監視装置及びSF6 ガスの状態監視装置の制御方法
Document Type and Number:
Japanese Patent JP3621812
Kind Code:
B2
Inventors:
Takashi Tojo
Oyatsu Osamu
Yukio Watanabe
Seiichi Nakahara
Oyatsu Osamu
Yukio Watanabe
Seiichi Nakahara
Application Number:
JP21096197A
Publication Date:
February 16, 2005
Filing Date:
August 05, 1997
Export Citation:
Assignee:
Saginomiya Co., Ltd.
International Classes:
G01L7/00; G01D21/00; G01L11/00; G01L19/12; G05B23/02; H01H33/56; (IPC1-7): G01L11/00; G01D21/00; G01L7/00; G01L19/12; G05B23/02
Domestic Patent References:
| JP8079966A | ||||
| JP6012976U |
Attorney, Agent or Firm:
Hideo Takino
Yasuo Nakauchi
Yasuo Nakauchi