Title:
SEMICONDUCTOR LASER
Document Type and Number:
Japanese Patent JP3235571
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enable the relative position of an active layer to a positioning mark to be accurately measured when the positioning mark is provided for passive alignment mounting.
SOLUTION: Positioning marks 5 and 6 are provided at a prescribed position to an active layer 1 buried in a semiconductor laser main body 10. Measuring marks 7 and 8 accurately formed by the use of the same mask with the positioning marks 5 and 6 are provided to a solder bonding Au metallized layer. The measuring marks 7 and 8 are provided closer to the active layer than the positioning marks 5 and 6, so that distances between the active layer 1 and the measuring marks 7 and 8 are very accurately measured, respectively.
Inventors:
Kenji Yamauchi
Application Number:
JP24933198A
Publication Date:
December 04, 2001
Filing Date:
September 03, 1998
Export Citation:
Assignee:
NEC
International Classes:
H01S5/00; H01S5/02; H01S5/022; (IPC1-7): H01S5/022
Domestic Patent References:
| JP9145965A | ||||
| JP10144998A | ||||
| JP4230050A | ||||
| JP11238936A | ||||
| JP10256664A | ||||
| JP9148623A | ||||
| JP5145177A |
Other References:
ＩＥＩＣＥ ＴＲＡＮＳ．ＥＬＥＣＴＲＯＮ．，Ｖｏｌ−Ｅ８０−Ｃ，Ｎｏ．１，ｐ．１１０７−１１１
Attorney, Agent or Firm:
Takao Maruyama