Title:
Salt for acid generators of a resist composition
Document Type and Number:
Japanese Patent JP6030818
Kind Code:
B2
Inventors:
Koji Ichikawa
Kazuhiko Hashimoto
Kazuhiko Hashimoto
Application Number:
JP2010141239A
Publication Date:
November 24, 2016
Filing Date:
June 22, 2010
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07D333/46; C07C309/17; C07D307/77; C09K3/00; G03F7/004; G03F7/039
Domestic Patent References:
| JP2004162040A | ||||
| JP2004145298A | ||||
| JP200537656A | ||||
| JP200946479A | ||||
| JP20044561A | ||||
| JP2002236358A | ||||
| JP2002236359A |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation