To form a pattern having more excellent resolution and focus margin (DOF).

This salt is represented by formula (I). [In the formula, Q1 and Q2 mutually independently represent a fluorine atom or a 1-6C perfluoroalkyl group; L1 represents *-CO-O-La- or *-CH2-O-Lb-, * represents a bond with -C(Q1)(Q2)-, La and Lb mutually independently represent a bivalent 1-15C saturated hydrocarbon group, and -CH2- contained in the bivalent saturated hydrocarbon group may be substituted by -O-, or -CO-; W1 represents 2-36C heterocyclic ring, and -CH2- contained in the heterocyclic ring may be substituted by -O-; and Z1+ represents an organic counter ion].