Title:
塩及びレジスト組成物
Document Type and Number:
Japanese Patent JP5793833
Kind Code:
B2
Abstract:
A salt having a divalent group represented by the formula (aa): wherein Xa and Xb independently each represent —O— or —S—, Ra, Rb, Rc and Rd independently each represent a hydrogen atom, a C1-C4 alkyl group or a C1-C4 alkoxy group, and m represents 1 or 2.
Inventors:
Koji Ichikawa
Masako Sugihara
Hiroshi Sakamoto
Masako Sugihara
Hiroshi Sakamoto
Application Number:
JP2010158480A
Publication Date:
October 14, 2015
Filing Date:
July 13, 2010
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07D317/72; C07D339/06; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
| JP2009046479A | ||||
| JP2010134279A | ||||
| JP2004004561A | ||||
| JP2006257078A |
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto
Toru Sakamoto