Title:
塩及びレジスト組成物
Document Type and Number:
Japanese Patent JP5808902
Kind Code:
B2
Inventors:
Koji Ichikawa
Isao Yoshida
Isao Yoshida
Application Number:
JP2010242476A
Publication Date:
November 10, 2015
Filing Date:
October 28, 2010
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07C309/17; C07C25/18; C07C381/12; C07D333/46; C09K3/00; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
| JP2007161707A | ||||
| JP2007145823A | ||||
| JP2006306856A | ||||
| JP2007145824A | ||||
| JP2008074843A | ||||
| JP2008290980A | ||||
| JP2006162735A |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation