Salt and a resist composition - Sumitomo Chemical Co., Ltd.

Title:

Salt and a resist composition

Document Type and Number:

Japanese Patent JP5909875

Kind Code:

B2

Inventors:

Koji Ichikawa
Hiroshi Sakamoto

Application Number:

JP2011106942A

Publication Date:

April 27, 2016

Filing Date:

May 12, 2011

Export Citation:

Assignee:

Sumitomo Chemical Co., Ltd.

International Classes:

C07C309/17; C07C381/12; C07D295/088; C09K3/00; G03F7/004; G03F7/039; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Toru Nakayama
Toru Sakamoto

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