Title:
SAMPLE BASE AND SUBSTRATE EVALUATION DEVICE USING THE SAME
Document Type and Number:
Japanese Patent JP2000174102
Kind Code:
A
Abstract:
To provide a sample base capable of holding substrates of plural sizes in an arbitrary direction with high accuracy even if a pellicle frame is mounted on the base.
A sample base has a base 2, a fixing support 3 fixed to the base 2, and a movable support 4 moved by a driving unit 6 mounted on the base 2 and can hold substrates of a plurality of sizes by moving the movable support 4, wherein the fixing support 3 and the movable support 4 are provided with the plurality of pairs of holding members 7a-10a and 17a-20a put into contact with and holding the substrates near both ends of each one side of each substrate.
Inventors:
AKENO MASANOBU
Application Number:
JP34816598A
Publication Date:
June 23, 2000
Filing Date:
December 08, 1998
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H01L21/68; B65G49/07; G01N21/00; G01N21/13; G03F1/66; G03F1/84; H01L21/027; (IPC1-7): H01L21/68; B65G49/07; G01N21/00; G01N21/13; G03F1/08; G03F1/14; H01L21/027
Attorney, Agent or Firm:
Togawa Hideaki
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