Title:
試料評価装置及び試料評価方法
Document Type and Number:
Japanese Patent JP5272335
Kind Code:
B2
Abstract:
To provide a sample evaluation device and a sample evaluation method capable of evaluating a crystalline sample without tilting the crystalline sample.
This sample evaluation method has a step S1 for acquiring a ZOLZ graphic 39 by transmitting an electron beam EB through a sample S, and a step S2 for determining a sample S thickness t and a lattice bending amount Δθ of a portion through which the electron beam EB is transmitted based on a geometric characteristic of the ZOLZ graphic and on a correspondence relation between the sample thickness and the lattice bending amount.
COPYRIGHT: (C)2009,JPO&INPIT
Inventors:
Takeshi Soeda
Application Number:
JP2007162944A
Publication Date:
August 28, 2013
Filing Date:
June 20, 2007
Export Citation:
Assignee:
富士通株式会社
International Classes:
G01N23/04; H01J37/26; H01L21/66
Domestic Patent References:
JP2005158287A | ||||
JP60150548A | ||||
JP2007093344A | ||||
JP2007071887A | ||||
JP9105729A | ||||
JP2002243667A | ||||
JP2000065762A | ||||
JP2003014667A | ||||
JP7286915A | ||||
JP7167719A |
Attorney, Agent or Firm:
Keizo Okamoto